Fabrication-resolution enhancement method based on low-energy multiple exposures
نویسندگان
چکیده
منابع مشابه
Fabrication-resolution enhancement method based on low-energy multiple exposures.
Laser direct writing (LDW) as a significant maskless lithography technique has been widely applied in scientific research and industrial manufacture. However, low fabrication resolution restricts its application in nanofabrication due to optical diffraction limit. This work presents a simple and novel way to improve the LDW fabrication resolution by multiple-exposure method with a low energy la...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2015
ISSN: 1094-4087
DOI: 10.1364/oe.23.029353